Sublimation Material Compatible ALD Unit "TF-ALD Series"
Unitize raw material containers, valves, piping, heaters, etc.! Two types of raw material containers can be selected.
The "TF-ALD Series" is an ALD unit designed to accommodate sublimation materials, developed based on research results from the Advanced Fusion Area Innovation Creation Base Formation Program at Tohoku University. It features 4-channel temperature control and up to 2 high-durability high-speed valves. Full control is possible via serial communication or ETHERNET communication. We offer six types of units depending on the vapor pressure of the materials and the types of reaction gases. 【Features】 - Integration of material containers, valves, piping, heaters, etc. - 4-channel temperature control and up to 2 high-durability high-speed valves. - Full control via serial communication or ETHERNET communication. - Six types of units available based on the vapor pressure of the materials and types of reaction gases. - Two types of material containers (large: approximately 180ml, small: approximately 60ml) can be selected. *For more details, please refer to the PDF document or feel free to contact us.
- Company：テクノファイン
- Price：Other
